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| My current research interests include (i) nanomaterials synthesis and integration, (ii) patterned carbon nanotube (CNT) growth for applications in biosensors and interconnects, (iii) atomic force microscope (AFM) CNT probe tips, and (iv) conductive CNT heat pipes. I am developing innovative wafer-scale fabrication processes for the reliable integration and fabrication of nanoelement-based sensors, electronic devices, and imaging probes. Catalyst nanopatterning and registration at wafer scale are achieved through e-beam lithography for controlling the placement and physical dimensions of the nanomaterials. Wafer-scale plasma enhanced chemical vapor deposition (PECVD) growth approach is utilized for controlling the height, diameter, aspect ratio, morphology, and orientation of CNTs. I am currently prototyping two CNT-based nanodevices. The first one is CNT AFM imaging probes that are fabricated by combining traditional CMOS cantilever fabrication process and nanocatalyst e-beam lithography. The CNT probe tips are grown directly from individually patterned catalyst spots on silicon cantilever beams. These tips are used for AFM tapping-mode critical dimension imaging applications. The second prototype is conformal CNT heat pipes on copper foils. The CNT heat pipes are much better than conventional thermal pads, and can be used as effective heat dissipating interface layers for instrument cooling needs. This work is in collaboration with the Hubble Space Telescope project team at NASA Goddard Space Flight Center. The processes that I am developing can be easily adapted to many other nanosensor and nanodevice fabrications and applications. I am a member at both the UC Berkeley Microfabrication Facility and the Stanford Nanofabrication Facility. Before joining the experimental nanotechnology group at Ames, I have spent a number of years designing and fabricating MEMS devices. |
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| Email: qye@mail.arc.nasa.gov Phone: 650-604-0497 |
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If you have trouble viewing this page due to a disability, please contact Amara de Keczer at 650-604-3473 or email at adekeczer@mail.arc.nasa.gov.
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