Title - Materials Processing Research Focus
Graphic bullet Development of a 'virtual reactor' for various semiconductor processing techniques
Graphic bullet Direct Simulation Monte Carlo (DSMC) analysis of processing reactors
Graphic bullet Microtopography evolution
Graphic bullet Integration of reactor- topography evolution - process models
Graphic bullet Neural nets in process control
Graphic bullet Measurement of collision cross sections using a cross beam apparatus and comparison with computational chemistry results
Graphic bullet Generation of data for reactor model validation in a GEC Reference plasma reactor
Graphic bullet Plasma route for sample sterilization

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