Chlorosilanes reaction set: high-pressure rate coefficients
k(T) = A Tn exp (-Ea/kT)
| Reaction | A | Ea | n |
| sec -1 or cc molecule-1 sec -1 | kcal/mol | ||
| SiCl3H -> SiCl2 + HCl | 4.387 1014 | 71.871 | |
| SiCl2 + HCl -> SiCl3H | 2.516 10-12 | 18.458 | |
| SiCl2H2 -> SiCl2 + H2 | 1.504 1014 | 75.628 | |
| SiCl2 + H2 -> SiCl2H2 | 8.151 10-12 | 40.485 | |
| SiCl2H2 -> SiClH + HCl | 6.595 1014 | 73.664 | |
| SiClH + HCl -> SiCl2H2 | 3.762 10-12 | 8.306 | |
| SiCl2H -> SiCl + HCl | 3.510 1013 | 85.493 | |
| SiCl + HCl -> SiCl2H | 4.193 10-12 | 39.179 | |
| SiCl2 + H -> SiCl + HCl | 4.068 10-10 | 18.862 | |
| SiCl + HCl -> SiCl2 + H | 1.053 10-10 | 19.490 | |
| SiClH2 -> SiCl + H2 | 3.975 1013 | 92.894 | |
| SiCl + H2 -> SiClH2 | 2.053 10-11 | 62.885 | |
| SiClH2 -> SiH + HCl * | 1.869 1014 | 61.507 | |
| SiH + HCl -> SiClH2 * | 1.106 10-18 | -2.032 | 2.158 |
| SiClH + H -> SiCl + H2 * | 3.647 10-16 | -1.210 | 1.736 |
| SiCl + H2 -> SiClH + H * | 6.681 10-10 | 32.586 | |
| SiClH + H -> SiH + HCl | 1.404 10-10 | 15.973 | |
| SiH + HCl -> SiClH + H | 8.414 10-11 | 17.112 | |
| SiCl + H2 -> SiH + HCl * | 3.149 10-11 | 31.267 | |
| SiH + HCl -> SiCl + H2 * | 1.559 10-18 | -1.707 | 1.984 |
| SiClH3 -> SiClH + H2 | 3.866 1014 | 65.016 | |
| SiClH + H2 -> SiClH3 | 4.341 10-12 | 18.114 | |
| SiClH3 -> SiH2 + HCl * | 4.889 1014 | 75.521 | |
| SiH2 + HCl -> SiClH3 * | 1.811 10-20 | -1.950 | 2.497 |
| SiH3 -> SiH + H2 | 2.406 1014 | 49.077 | |
| SiH + H2 -> SiH3 | 4.454 10-11 | 7.515 | |
| SiH4 -> SiH2 + H2 * | 5.658 1014 | 58.441 | |
| SiH2 + H2 -> SiH4 * | 1.739 10-18 | -1.868 | 1.965 |
* Loose transition states, treated with Gorin-like model.
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